Titanium Metals - High-Purity Titanium
High-purity titanium achieves stable quality at low oxygen along with purity levels of 4N5 to 5N. It is produced in our exclusive EB melting furnace using high-purity titanium sponge manufactured in our unique in-house version of the Kroll process.
High-purity titanium products are provided in ingots as well as in billets (round or square cross-section metal) that are microstructure-controlled by forging, depending on customer requirements.
Applications
Sputtering targets for forming semiconductor film such as for DRAM
Specifications
[Ti；%、Others；ppm]
| Product No. | Ti | Fe | Ni | Cr | Al | Si | Sn | Cu | O | |
|---|---|---|---|---|---|---|---|---|---|---|
| 4N5 | Spec. | >99.995 | <15 | <5 | <5 | <5 | <3 | <3 | <3 | <300 |
| Typical | 5 | 2 | <1 | <1 | <0.5 | <0.5 | <0.5 | <200 |
* Other metal and gas constituents are kept restricted to a low level.